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RF MEMS and Tunable Circuits

RF Micro Electro Mechanical Systems (MEMS) are an attractive alternative to solid state technologies for the realization of RF switches and tunable components since it offers low power consumption, improved RF performance, high isolation and linearity, high miniaturization and reduced costs.

RF MEMS technology finds attractive applications in space, security, safety and communication systems.

The R&D engineers working at RF Microtech have more than 10 years of experience in designing and testing RF MEMS, in collaboration with the most skilled RF MEMS academicals and industrial research centers.

RF Microtech provides custom design and testing for RF MEMS switches and tunable components from DC up to W band.

As a fabless company, RF Microtech supports the customer in all the passages needed to reach the market: choice of the most appropriate RF MEMS foundry, design, testing, and industrialization assistance.

RF Microtech during its activity has earned a deep knowledge of design, manufacturing and testing thanks to a long and established cooperation with the Foundry FBK (Fondazione Bruno Kessler), http://mems.fbk.eu/. The 6 inches eight-mask surface micro-machining process allows to manufacture both cantilever and air-bridges, ohmic and capacitive switches monolithically integrated in the same substrate (HR Silicon or Quartz). 0-level Quartz caps are implemented to protect the MEMS movable parts during handling and mounting.

RF MEMS Switches with improved performance have been demonstrated from DC up to W band.

Circuital and full-wave simulation tools are utilized to develop electromagnetic and thermo-mechanical models and design a large variety of innovative and high performance components, presented in international journal and conference papers.

RF Microtech offers the following services

  • Custom electromagnetic and thermo-mechanical design of the MEMS device and packaging.
  • Prototyping and medium-scale manufacturing of RF MEMS
  • Multi-Project Wafer service
  • RF test and Characterization up to 67GHz
  • Test for reliability assessment

Examples of developed prototypes

Name Main Feature Tech Notes
Packaged MEMS SP4T Switch Packaged MEMS SP4T Switch Frequency Band: 0 ÷ 2 GHz
RF Connection: SMA and SSMA
PDF
Packaged MEMS SPDT Switch Packaged MEMS SPDT Switch Frequency Band: 0 ÷ 10 GHz
RF Connection: SMA
PDF
5-bit MEMS Phase Shifter 5-bit MEMS Phase Shifter Frequency Band: 17 ÷ 18 GHz
RF Connection: SMA on Test Jig
PDF
SMD Packaged 5 bit MEMS Phase Shifter SMD Packaged 5 bit MEMS Phase Shifter Frequency Band: 20.2-21.2 GHz
RF Connection: SMD Leadless Package
PDF
MEMS DPDT Switch MEMS DPDT Switch Frequency Band: 0 ÷ 40 GHz
RF Connection: Coplanar Pads
PDF
MEMS SP4T Switch MEMS SP4T Switch Frequency Band: 0 ÷ 33 GHz
RF Connection: Coplanar Pads
PDF
MEMS SPDT Switch MEMS SPDT Switch Frequency Band: 0 ÷ 35 GHz
RF Connection: Coplanar Pads
PDF
0-10GHz MEMS SP16T MEMS SP16T Switch Frequency Band: 0 ÷ 10 GHz
RF Connection: SMA on Test Jig
PDF
Programmable High Voltage Control Board Programmable High Voltage Control Board Output Voltage 40V-80V in step of 10V
Interface USB
PDF

 

RF MEMS Gallery